A dry screw vacuum pump is a type of positive displacement vacuum pump that uses two intermeshing screw rotors to create a vacuum without the need for lubricating or sealing fluids (hence "dry"). These pumps are widely used in industrial and scientific applications where oil-free, clean, and reliable vacuum is required.
Oil-Free Operation
No lubrication inside the pumping chamber, eliminating contamination risks (critical for semiconductors, food processing, and pharmaceuticals).
Reduces maintenance costs (no oil changes or oil mist filters needed).
High Efficiency & Performance
Capable of achieving ultimate vacuum levels down to 0.1 mbar (0.01 kPa) or lower in multistage designs.
Maintains stable pumping speed even at low pressures.
Low Maintenance & Long Lifespan
Non-contacting rotors with precise clearances reduce wear.
No internal valves or vanes, minimizing mechanical failures.
Handles Various Gases & Vapors
Suitable for corrosive, condensable, and particle-laden gases (unlike oil-sealed pumps).
Can handle wet processes (e.g., chemical vapor deposition, distillation).
Energy Efficient
Variable speed drives (VSD) optimize power consumption based on demand.
Two helical rotors (screws) rotate in opposite directions, trapping gas between them and the pump housing.
As the screws turn, gas is compressed and pushed toward the exhaust port.
No internal metal-to-metal contact (clearance gaps are maintained).
Cooling is often provided by air or water to manage heat from compression.
✔ Semiconductor & Electronics – CVD, etching, ion implantation.
✔ Pharmaceutical & Chemical – Solvent recovery, distillation, freeze drying.
✔ Food & Packaging – Vacuum packaging, dehydration.
✔ Industrial Processes – Vacuum furnaces, degassing, composite molding.
✔ Environmental & Energy – Biogas recovery, hydrogen processing.
| Feature | Dry Screw Pump | Oil-Sealed Rotary Vane | Liquid Ring Pump | Scroll Pump |
|---|---|---|---|---|
| Oil-Free? | ✅ Yes | ❌ No (oil-lubricated) | ❌ No (water/oil used) | ✅ Yes |
| Ultimate Vacuum | 0.1 mbar | 0.001 mbar | 30 mbar | 0.01 mbar |
| Maintenance | Low | High (oil changes) | Medium (seal wear) | Medium |
| Handles Corrosive Gases? | ✅ Yes | ❌ No | ✅ Yes (with proper liquid) | ❌ Limited |
| Energy Efficiency | High | Medium | Low | Medium |
❌ Higher initial cost compared to oil-lubricated or liquid ring pumps.
❌ Heat generation requires cooling (air or water).
❌ Not suitable for ultra-high vacuum (UHV) (below 0.001 mbar, turbomolecular pumps are better).
Leybold (Germany)
Pfeiffer Vacuum (Germany)
Atlas Copco (Belgium/Sweden)
Ebara (Japan)
Busch (Germany)
Dry screw vacuum pumps are ideal for clean, oil-free, and high-throughput vacuum applications in industries like semiconductors, chemicals, and food processing. They offer long life, low maintenance, and excellent gas handling but come at a higher initial cost than traditional oil-sealed pumps.
The above content was compiled and published by Zhilong Oil Drum Pump Supplier.